Barometric sensors of integrated navigation system of unmanned aircraft
vechiles
V.J. Larin, Y.G. Rodchenko
In the article the structure, operation
principle, performances of micromechanical transformers of pressure are built
on the basis of modern MEMS technologies have been considered. The mathematical
model of transforming process taking into account of total error of pressure
measuring has been analyzed. The components of total error and its mathematical
model have been examined. It is pointing the description and results of
experimental researches of barometcric transformer at
stable condition and at state of influence of changing of environment
temperature.
Key words: barometcric transformers, MEMS technology, sensing element,
experimental researches, influence of temperature.