Barometric sensors of integrated navigation system of unmanned aircraft vechiles

V.J. Larin, Y.G. Rodchenko

In the article the structure, operation principle, performances of micromechanical transformers of pressure are built on the basis of modern MEMS technologies have been considered. The mathematical model of transforming process taking into account of total error of pressure measuring has been analyzed. The components of total error and its mathematical model have been examined. It is pointing the description and results of experimental researches of barometcric transformer at stable condition and at state of influence of changing of environment temperature.

Key words: barometcric transformers, MEMS technology, sensing element, experimental researches, influence of temperature.